High Vacuum Sputtering System

Revolutionizing the World of Sputtering and Evaporating

This Ultra High Vacuum Sputtering System stands out from traditional models by incorporating various industrial design factors based on user requirements and environmental considerations. Its modular combination mode allows for convenient installation, transportation, and maintenance. The sleek and elegant overall shape, combined with the fine surface treatment and translucent acrylic mask in a gray tone, creates a simple, modern, and beautiful aesthetic.

Ergonomics and interactions are at the forefront of the control screen design. The system ensures ease of use and intuitive operation, enhancing the overall user experience. The main material used for the shell is high-quality cold plate, with sheet metal forming and environmental-friendly spray technology. The internal skeleton is made of aluminum, while the mask is crafted from acrylic material. The fuselage design is achieved through a screen printing process.

Measuring at 2800mm in width, 1200mm in depth, and 1500mm in height, this Ultra High Vacuum Sputtering System is a testament to the meticulous attention to detail and technical specifications.

Operating the system is a breeze. The Ultra High Vacuum Sputtering System can deposit metal and dielectric thin films on substrates up to 300mm. With magnetron sputtering sources utilizing RF, DC, or pulsed DC power sources, it can operate in single mode or co-deposition mode, catering to a wide range of requirements.

The project, which took place from January to November 2020 in Huai'an, Jiangsu Province, China, was a collaborative effort between designers and engineers. The goal was to improve upon existing functional machines by incorporating ergonomic design principles and modern aesthetics.

The design process presented several challenges, particularly in establishing the relationship between the overall system, operating modes, ergonomic design, and interaction design in the control system. However, these challenges were overcome, resulting in a system that seamlessly integrates form and function.

The Ultra High Vacuum Sputtering System features multiple UHV chambers, including an evaporation chamber, sputtering chamber, processing chamber, load lock, and electron beam evaporation source. The system is fully automatic, supporting semi-automatic and manual modes, as well as remote maintenance. Its neat and intuitive design, elaborate surface treatment, and smooth texture create a sense of simplicity, modernity, and beauty. Every detail has been carefully considered to ensure ergonomic excellence.

This groundbreaking design has been recognized with the Bronze A' Design Award in the Manufacturing and Processing Machinery Design category in 2021. This prestigious award celebrates designs that showcase ingenuity, technical prowess, and a commitment to improving quality of life.